In the last decades, Micro Electro-Mechanical Systems (MEMS) have attracted a lot of interest due to their small size, low-cost batch production, high performances and wide range of applications [1]. However, the functioning of these devices, which is often related to the dynamic response of its components, can be affected by external vibrations. Locally resonant metamaterials (LRM) could represent a possible solution to isolate MEMS devices from unwanted external vibrations. Such media, usually constructed by the periodic repetition of a unit cell with a resonant part, allow damping out elastic and acoustic waves in some frequency ranges called band gaps [2]. In [3], the authors propose to isolate a MEMS device by attaching it on a LRM plate with square unit cells. Numerical analyses and experimental tests show the absorption properties of the LRM plate within its band gaps, even if some local resonance modes appear. These unwanted modes arise due to the presence of the MEMS device and of the tuning/sensing electrodes which alter the plate periodicity. In this work, we propose a new device in which an isolating LRM plate and a MEMS resonator are integrated and fabricated together. The LRM plate has a new microstructure with hexagonal unit cells, optimised to filter vibration around the driving frequency of the resonator. At difference from [3] the MEMS resonator is hanging on the metamaterial plate, between the substrate and the plate. The proposed solution allows to keep unchanged the periodicity of the LRM and, therefore, improves the absorption of external vibrations. REFERENCES [1] B. Vigna, P. Ferrari, F.F. Villa, E. Lasalandra, S. Zerbini. Silicon Sensors and Actuators. Springer, 2022. [2] V. Laude, Phononic Crystals. De Gruyter, 2015. [3] Z. Yao, V. Zega, Y. Su, Y. Zhou, J. Ren, J. Zhang and A. Corigliano. Design, Fabrication and Experimental Validation of a Metaplate for Vibration Isolation in MEMS. Journal of Microelectromechanical Systems 29 (5), 2020.